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ULVAC Qulee BGM2-102ΒΆ

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Qulee BGM2-102

Quadrupole Residual Gas Analyzer (RGA)

Product OverviewΒΆ

The ULVAC Qulee BGM2-102 is a compact quadrupole residual gas analyzer designed for process monitoring and diagnostics in vacuum systems.
It combines a wide dynamic range, high sensitivity using an electron multiplier, and a standalone display unit, allowing both PC-based and PC-less operation.

The BGM2-102 is well suited for thin-film deposition systems, plasma devices, vacuum furnaces, and R&D vacuum setups, where continuous monitoring of gas composition is required.

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Key FeaturesΒΆ

  • Quadrupole mass spectrometer
  • Mass range: 1 – 100 amu
  • Secondary Electron Multiplier (SEM) detector for high sensitivity
  • Minimum detectable partial pressure: down to 10⁻¹² Pa
  • Integrated display unit – measurement possible without a PC
  • One-Click operation for common gases (He, Hβ‚‚O, Nβ‚‚, Oβ‚‚, user-defined)
  • Leak check and trend monitoring functions
  • Total pressure estimation capability
  • Compact sensor unit for direct chamber mounting

Typical ApplicationsΒΆ

  • Residual gas analysis in:
  • Vacuum deposition systems (evaporation, sputtering)
  • Plasma processing equipment
  • Vacuum furnaces
  • Leak detection (helium, background gases)
  • Monitoring of:
  • Outgassing
  • Water and oxygen contamination
  • Process gas stability
  • Research and development vacuum diagnostics

Technical SpecificationsΒΆ

Item Specification
Model BGM2-102
Mass separation Quadrupole
Mass range 1 – 100 amu
Detector Secondary Electron Multiplier (SEM)
Sensitivity 4 A/Pa
Minimum detectable partial pressure 1 Γ— 10⁻¹² Pa
Maximum operating pressure 1 Γ— 10⁻² Pa
Resolution M/Ξ”M β‰ˆ 1 (10% peak height)
Ion source Electron impact
Total pressure measurement Supported
One-Click function He / Hβ‚‚O / Nβ‚‚ / Oβ‚‚ / Any gas
Power supply DC 24 V Β±10 %, 50 W

Bake-Out & Environmental LimitsΒΆ

Condition Temperature
Bake-out (sensor attached) up to 120 Β°C
Bake-out (sensor removed) up to 250 Β°C
Operating temperature 10 – 40 Β°C

Software & ControlΒΆ

  • Qulee QCS software (Ver. 4.2 or later)
  • Compatible with Windows 8 / 10 / 11
  • Functions include:
  • Mass spectrum acquisition
  • Trend plotting of selected masses
  • Leak check modes
  • Data logging and export
  • Can be operated:
  • Standalone (display unit)
  • Via PC for long-term logging and analysis

System ConfigurationΒΆ

A typical BGM2-102 setup includes:

  • BGM2-102 sensor unit
  • Control and display unit
  • SEM detector module
  • PC (optional) running Qulee QCS software
  • Vacuum flange-mounted analyzer tube

Optional components: - Analysis tube: BGM-AN102 - Ion source: BGM-IS01 - Electron multiplier: BGM-EM01

Notes from Practical UseΒΆ

  • Excellent sensitivity for Hβ‚‚, Hβ‚‚O, Oβ‚‚, and light contaminants
  • Particularly useful for process drift and leak onset detection
  • SEM gain should be monitored during long-term operation
  • Proper bake-out significantly improves baseline stability
  • Ion gauges / Pirani gauges
  • Turbo molecular pumps (TMP)
  • Plasma sources and deposition chambers
  • Experimental DAQ and control systems

Internal ReferencesΒΆ

  • Hardware β†’ Gas Analysis β†’ ULVAC BGM2-102
  • Vacuum β†’ Diagnostics β†’ Residual Gas Analysis
  • Experiments β†’ Process Monitoring β†’ QMS